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Equipment

Equipment of SEM

The Scanning Electron Microscope(SEM)uses opto-electronic system to focus electrons generated by an electronic gun onto a small spot on the sample surface.This beam of electrons will then interact with the sample material to generate secondary electrons, back scatter and signature X-ray etc.A scan coil is then placed on sample surface to pick up those signals.The SEM works by collecting secondary electrons to form an image. Because the SEM has high resolution(greater than 10 K)and large depth of field,its primary use is in observing sample surface and cross section micro structure.When the SEM tool is equipped with an X-ray Energy Dispersive Spectrometer (EDX),it can also be used to provide micro(region)material analysis of the sample surface.This includes qualitative,semi-qualitative element analysis and specific regional analysis of point,line scan & mapping.

Hitachi S-4800

Electron gun:Cold cathode type.
Resolution:1.0nm(accelerating voltage 15 kV).
2.0nm(accelerating voltage 1kV).
Magnification:30–800k.
Accelerating voltage:0.5–30V.

Hitachi S-3400

Electron gun:Pre-entered cartridge filament.
Resolution:3.0 nm(accelerating voltage 30kV).
10nm(accelerating voltage 3kV).
Magnification:5 – 300 k.
Accelerating voltage:0.3–30 kV.

Application:

  1. Observation of material’s surface microstructure.
  2. It is possible to provide precise dimensional measurement such as film thickness etc by using SEM's build in measurement tool.
  3. EDX can provide qualitative or semi-qualitative element analysis of the surface sample as well as point, line scan or mapping analysis of the specified region.
  4. SEM imaging with layer removal technique (de-process) can provide useful clue for reverse engineering of electrical circuits.
  5. Using low energy electron beam for Passive Voltage Contrast (PVC) can point out the precise location of electrical leakage or bad contact. Such info can be used for failure analysis.

For more information about reservations or working with the SEM Facility:
http://www.hitachi-hitec.com/
http://macs.advancedstudieslabs.org/

If you have any question, please contact with MMC Lab ( phone 02-24622192 ext.6418 ).

Equipment of TEM

TEM works like a slide projector. A projector shines a beam of light which transmits through the slide. The patterns painted on the slide only allow certain parts of the light beam to pass through. Thus the transmitted beam replicates the patterns on the slide, forming an enlarged image of the slide when falling on the screen.

TEMs work the same way except that they shine a beam of electrons (like the light in a slide projector) through the specimen (like the slide). However, in TEM, the transmission of electron beam is highly dependent on the properties of material being examined. Such properties include density, composition, etc. For example, porous material will allow more electrons to pass through while dense material will allow less. As a result, a specimen with a non-uniform density can be examined by this technique. Whatever part is transmitted is projected onto a phosphor screen for the user to see.

  1. Electronic sources:LaB6。
  2. Working voltage:200 kV。
  3. PointResolution:0.204 nm。
  4. LatticeResolution:0.143 nm。
  5. Magnification:2 k-1.5 M。
  6. CCD : 2.6 k ´ 2.7 k

 

Application:

  1. Observation of material’s surface microstructure.
  2. It is possible to provide precise dimensional measurement such as film thickness etc by using TEM's build in measurement tool.
  3. EDX can provide qualitative or semi-qualitative element analysis of the surface sample as well as point, line scan or mapping analysis of the specified region.

For more information about reservations or working with the TEM Facility:
http://www.jeol.com/
http://mcc.lsu.edu/

If you have any question, please contact with MMC Lab (phone 02-24622192 ext.6418 ).